Ekukhiqizweni kwe-semiconductor, izinhlelo zokusabalalisa ze-cryogenic kulindeleke ukuthi zenze okungaphezu kokudlulisa i-nitrogen noma i-argon ewuketshezi kusuka endaweni eyodwa kuya kwenye. Uketshezi kufanele luhlale luzinzile, luhlanzekile, futhi luyisigaba esisodwa kuze kube yilapho lusetshenziswa. Ngisho namanani amancane okungena kokushisa angadala igesi ye-flash, ukushintshashintsha kwengcindezi, noma ukungcola komswakama okuthinta ukuzinza kwenqubo.

YingakhoIpayipi Elifakwe Umshini Wokuhlanzaizinhlelo zivame ukusetshenziswa kuma-semiconductor fabs esikhundleni samapayipi ajwayelekile afakwe i-foam insulation. Uma kuhlanganiswa ne-Uhlelo Lwephampu Yokupompa I-Dynamic, ukuvuza kokushisa okuphelele kungahlala ngaphansi kwama-3 W/m ngenkathi kugcinwa ukuzinza kwe-vacuum isikhathi eside kulo lonke ulayini wokudlulisa.

Ngezicelo ze-semiconductor, ukufakelwa kwe-vacuum akufanele kubhekwe njengengqimba engenzi lutho ezungeze ipayipi. Kuyisistimu yokushisa esebenzayo edinga ukusebenza kwe-vacuum okulinganiselwe kanye nokugcinwa isikhathi eside. Ezindaweni zokukhiqiza ama-chip ngokunemba okuphezulu, ngisho nokwenyuka okuncane kokushisa koketshezi kungaholela ezimweni zokugeleza kwezigaba ezimbili eziphazamisa amasekethe okupholisa, izinhlelo zokuhlanza, noma imishini yokulawula izinqubo.

Kungani Ukuvuza Kokushisa Kubalulekile Kuzinhlelo Ze-Cryogenic Semiconductor

Yonke imigqa yokudlulisa i-cryogenic ithintwa yizinhlobo ezintathu eziyinhloko zokudlulisa ukushisa:

• imisebe kuyo yonke indawo ezungezile
• ukuqhutshwa kwegesi okubangelwa ama-molecule asele
• ukuqhutshwa okuqinile ngokusebenzisa izisekelo kanye nezihlukanisi

Kuklanywe kahleIpayipi Elifakwe Umshini Wokuhlanza, ingcindezi ye-annular ivame ukwehla ngaphansi kuka-1×10⁻⁴ Pa. Kulelo zinga le-vacuum, ama-molecule egesi asele anendlela ekhululekile ephakathi nendawo enkulu kakhulu kune-annular gap, okunciphisa kakhulu ukuqhutshwa kokushisa kwegesi.

Ukudluliselwa kokushisa okubangelwa imisebe kulawulwa kusetshenziswa ukufudumeza okunezingqimba eziningi (i-MLI). Ukufudumeza kuqukethe izendlalelo ezishintshanayo ze-foil ekhanyayo kanye nezinto ezikhipha umoya eziphansi. Ngokuxinana kwezingqimba kanye nendlela yokufaka efanele, ukufudumeza kokushisa okubangelwa imisebe kungancishiswa kube ama-watts ambalwa kuphela ngemitha yesikwele.

Indlela esele yokushisa ivela kakhulu ezisekelweni zemishini. Ukuze kuncishiswe lo mphumela, izinto ezisebenzisa ugesi ophansi njenge-G-10 fiberglass noma i-Torlon® zivame ukusetshenziswa. Lezi zisekeli zisadinga amandla anele omshini ukuze zibekezelele ukufinyela kokushisa, ukudlidliza, kanye nomthwalo wokuzamazama komhlaba ngesikhathi sokusebenza.

Emabangeni amade okudlulisa, umehluko phakathi kokufakwa kwe-vacuum kanye nokufakwa kwe-foam ubonakala kakhulu. Uhlelo lwe-vacuum olugcinwe kahle lungagcina ukusebenza kahle kokushisa okuzinzile iminyaka eminingi, kuyilapho ukufakwa kwe-foam kubamba kancane kancane umswakama ovela emoyeni. Uma umswakama ungena esakhiweni sokufakwa kwe-insulation futhi uqina, ukusebenza kahle kokushisa kuvame ukwehla ngokuhamba kwesikhathi.

Ezinhlelweni zokusabalalisa ze-LN₂ ze-semiconductor ezisebenzayo,amapayipi afakwe ugesikunganciphisa kakhulu ukubila uma kuqhathaniswa nemigqa yendabuko efakwe i-foam, ikakhulukazi ezindaweni ezinde zangaphandle noma ezisebenza njalo ezinhlokweni eziphambili.

Uhlelo Lwephampu Yokupompa I-Dynamic

Inkinga eyodwa ngamajakethi e-vacuum angaguquki ukuthi ikhwalithi ye-vacuum ingase iwohloke kancane kancane eminyakeni edlule ngenxa yokuphuma kwegesi, ukungena kwe-helium, noma ukuvuza okuncane kakhulu.

Ukuze kuxazululwe lokhu, ububanzi obukhuluIpayipi Elifakwe Umshini Wokuhlanzaizinhlelo zingafakelwaUhlelo Lwephampu Yokupompa I-DynamicUhlelo luvame ukufaka ilungiselelo le-compact turbomolecular noma i-scroll pump elibuyisela njalo i-annular vacuum esimweni sayo sokuqala sokuklama.

Amazinga e-vacuum aqashwa njalo kusetshenziswa ama-cold-cathode gauges. Iphampu isebenza kuphela uma ingcindezi ikhuphuka ngaphezu kwendawo ebekwe kuyo, ngakho-ke ukusetshenziswa kwamandla nezidingo zokulungisa zihlala ziphansi.

Kwesinye iphrojekthi yokuthuthukisa isikhungo se-semiconductor eHsinchu, eTaiwan, uhlelo lokupompa i-vacuum olulawulwa ngenkuthalo luvumele inhloko yokudlulisa i-LN₂ esigugile ukuthi ibuyisele ukusebenza kokushisa eduze nesimo sayo sokuqala sokusebenza ngaphandle kokuvala umugqa wokukhiqiza. Kumaphrojekthi amasha, ukulungiswa kwe-vacuum esebenzayo kunikeza abaqhubi ukuzethemba okungcono ekuzinzeni kokushisa isikhathi eside kuyo yonke impilo yesistimu.

Izinto zokwakha kanye nomklamo wesistimu

Ngezinhlelo zokusebenza ze-semiconductor kanye ne-ultra-high-purity, ipayipi lenqubo yangaphakathi livame ukukhiqizwa ngensimbi engagqwali engu-304L noma engu-316L. Izindawo zangaphakathi ziyahlanzwa, zihlanzwe, futhi zingasebenzi ukuze kuhlangatshezwane nezidingo zesevisi yokuhlanza umoya-mpilo nokunciphisa ingozi yokungcola.

Ijakethi yangaphandle ingasebenzisa insimbi yekhabhoni ependiwe noma insimbi engagqwali kuye ngokuthi indawo yokufaka injani. Ezindaweni eziseduze negumbi lokuhlanza, amajakethi angaphandle angagqwali avame ukuthandwa ukuze kugwenywe ukugqwala noma ukungcola kwendawo.

Ukufinyela kokushisa nakho kudinga ukucatshangelwa ngokucophelela. Umugqa wokudlulisa we-LN₂ ungafinyela cishe ku-2.5–3 mm ngemitha phakathi kokushisa okuma kanye nokushisa okusebenzayo. Ukuze kuncishiswe lokhu kunyakaza, ama-compensator okukhulisa uhlobo lwe-bellows avame ukufakwa ezindaweni ezibalwe ze-anchor kuyo yonke inethiwekhi yamapayipi.

Lapho kudingeka ukunyakaza noma ukuguquguquka,Ipayipi Eliguquguqukayo Elifakwe Umshini WokufudumezaIzindawo ezivamile zihlanganisa ukuxhumeka kwamathangi, ukuxhumanisa imishini, amagatsha amaningi, kanye nama-skid enqubo ehambayo.

Lawa mapayipi aguquguqukayo asebenzisa umongo wangaphakathi ogoqekile kanye nejakethi ye-vacuum kanye nesakhiwo se-MLI esifana nepayipi le-vacuum eliqinile. Izinhlangano eziklanywe kahle zingagcina ubuqotho be-vacuum ngemva kokujikeleza okuphindaphindiwe kokushisa kwe-cryogenic ngenkathi futhi zivimbela ukwakheka kweqhwa langaphandle okuvamile kumapayipi aluka angafakwanga i-insulation.

Amavalvu Afakwe Umshini WokufudumezafuthiIzihlukanisi Zesigaba

Ukulawula ukuvuza kokushisa akugcini nje ezingxenyeni zamapayipi aqondile.abahlukanisi besigabafuthi zidlala indima enkulu ekugcineni izimo zokugeleza kwe-cryogenic ezizinzile.

A I-Vacuum Insulated Valvengokuvamile isebenzisa i-bonnet ende kanye nomzimba ofakwe ijakethi ye-vacuum ukugcina izindawo ezibalulekile zokuvala kude namazinga okushisa aphansi kakhulu. Lokhu kusiza ukuvimbela ukubanda eduze kokupakisha kwesiqu futhi kunciphisa ukuminyana okungafuneki ngaphakathi kwesakhiwo se-valve.

Ngaphandle kokufakwa kwe-vacuum insulation, ama-valve angaba izindawo zokuvuza eziqinile ngaphakathi kohlelo. Ensizeni yoketshezi ecryogenic, lokhu kungadala amaphakethe omusi wendawo, izimo zokugeleza ezingazinzile, noma izehlakalo zesando samanzi.

Kuzinhlelo zenqubo ye-semiconductor, ama-valve e-globe e-extended-bonnet kanye nama-valve ebhola angena phezulu avame ukusetshenziswa ngokuhambisana nezimfuneko ze-ASME B31.3 kanye ne-EN 13480.

A Isihlukanisi Sesigaba Esifakwe Umshiniisetshenziselwa ukususa igesi ye-flash ngaphambi kokuba uketshezi lungene emishinini ebucayi engezansi. Ezinhlelweni ze-semiconductor, ukugeleza kwezigaba ezimbili okungazinzile kungadala ukushintshashintsha kwengcindezi okukhulu ngokwanele ukuqala ama-alamu enqubo noma ukukhiya kwemishini.

Iningi lemiklamo yokuhlukanisa isebenzisa i-tangential inlet kanye nesakhiwo sangaphakathi se-demister ukuthuthukisa ukusebenza kahle kokuhlukanisa phakathi komusi noketshezi. Emaphrojekthini amaningi, i-separator ihlanganiswa ne-Mini Tank efakwe eduze kwephansi lenqubo. I-mini tank isebenza njengevolumu yendawo yokuvimba esisiza ekuqiniseni ukuguquguquka kwesidingo sesikhathi esifushane ngaphandle kokufaka umthwalo wokushisa owengeziwe obalulekile.

Isibonelo sephrojekthi ye-semiconductor

Iphrojekthi yokwandiswa kwesikhungo se-DRAM eNingizimu Korea idinga inethiwekhi entsha yokusabalalisa ye-LN₂ enikeza imishini yokuhlola epholile yokucwiliswa kanye namathuluzi okucubungula i-wafer.

Ukufakwa kwakuhlanganisa cishe amamitha angu-180 epayipi eliqinile elifakwe i-Vacuum Insulated elixhunywe emagatsheni amaningi amathuluzi ngokusebenzisa ama-Vacuum Insulated Flexible Hose assemblies. I-Vacuum Insulated Phase Separator kanye ne-2 m³ Mini Tank kwafakwa eduze kwendawo yokugcina izinto eziningi.

Uhlelo lwe-Dynamic Vacuum Pump lugcine ingcindezi ye-annular ingaphansi kuka-5×10⁻⁶ mbar emigqeni yokudlulisa eyinhloko engu-6-intshi.

Ngesikhathi sokusebenza, ukuvuza kokushisa okulinganisiwe ku-header eyinhloko kwaba cishe yi-1.3 W/m ngaphansi kwezimo zokusebenza ezizinzile. Ngemva konyaka owodwa wenkonzo eqhubekayo, imijikelezo yokubuyisa i-vacuum ngezikhathi ezithile igcine ukusebenza kokushisa kusondele esimweni sokuqala sokuqala.

Uma kuqhathaniswa nomqondo wangaphambilini wokufakwa kwe-foam, lesi sikhungo sibike ukulahlekelwa kwe-nitrogen ewuketshezi okuphansi kakhulu kanye nokuqina kokusebenza okuthuthukisiwe. Amalogi enqubo nawo abonisanga izehlakalo zokungcoliswa okuhlobene nomswakama okuhlobene nokuwohloka kokufakwa kwe-insulation.

Izicelo

Izinhlelo zokudlulisa i-cryogenic ezifakwe i-vacuum zisetshenziswa kabanzi ekukhiqizweni kwe-semiconductor, ingqalasizinda ye-LNG, ukusatshalaliswa kwegesi yezimboni, kanye nokusetshenziswa kwe-hydrogen ewuketshezi.

Nakuba izindawo zokusebenza zihlukile, inhloso yobunjiniyela ihlala ifana:

• gcina ukuzinza kwe-vacuum
• nciphisa ukungena kokushisa
• gcina ukuzinza kwesigaba kuyo yonke inqubo yokudlulisa

Ukwakhiwa kwesistimu kuvame ukulandela amazinga omhlaba wonke njenge-ASME B31.3, EN 13480, kanye ne-ISO 21029 kuye ngobubanzi bephrojekthi kanye nezidingo zesifunda.

Ezikhungweni ze-semiconductor, ukusebenza kohlelo lokusabalalisa lwe-cryogenic kuthinta ngqo ukusebenza kahle, ukusetshenziswa koketshezi, kanye nokuthembeka kwenqubo yesikhathi eside. Ngenxa yalokho, amapayipi, ama-valve, ama-separator, kanye nezinhlelo zokulungisa i-vacuum kufanele zakhiwe njengohlelo olulodwa lokushisa oluhlanganisiwe kunezingxenye ezizimele.

At I-HL Cryogenics, sisebenzisana nezinkontileka ze-EPC, izinkampani zegesi, kanye nezikhungo ze-semiconductor ukuthuthukisa izixazululo zokudlulisa i-cryogenic ngokusekelwe ezimweni zangempela zokusebenza, imigomo yomthwalo wokushisa, kanye nezidingo zokufaka esikhundleni sokulungiswa kwekhathalogi ejwayelekile.

Uma uhlela iphrojekthi entsha ye-semiconductor fab noma uthuthukisa inethiwekhi yokusabalalisa ye-LN₂ ekhona, ithimba lethu lobunjiniyela lingakusiza ukuhlola ukusebenza kokuvuza kokushisa, isu le-vacuum, kanye nokucushwa kwesistimu ukuze kusebenze isikhathi eside.