Izinhlelo zokupholisa ze-nitrogen ewuketshezi zisetshenziswa kabanzi embonini ye-semiconductor kanye ne-chip, okuhlanganisa nenqubo,
- Ubuchwepheshe be-Molecular Beam Epitaxy (MBE)
- Ukuhlolwa kwe-chip ngemuva kwephakheji ye-COB
Imikhiqizo Ehlobene
Uchungechunge Lwepayipi Elifakwe Umshini Wokuhlanza
Uchungechunge lwe-Vacuum Insulated Flexible Hose
Uhlelo Lwephampu Yokupompa I-Dynamic
Uchungechunge Lokuhlukanisa Isigaba Esifakwe Umshini
Uchungechunge lweValve Efakwe Umshini
Imishini Yokusekela Uhlelo Lokuphayipha
I-EPITAXY YOMGQA WAMAMOLEKULA
Ubuchwepheshe be-Molecular Beam Epitaxy (MBE) basungulwa ngawo-1950 ukuze kulungiswe izinto zefilimu encane ye-semiconductor kusetshenziswa ubuchwepheshe bokuhwamuka kwe-vacuum. Ngokuthuthuka kobuchwepheshe be-vacuum obuphezulu kakhulu, ukusetshenziswa kobuchwepheshe kuye kwandiselwa emkhakheni wesayensi ye-semiconductor.
I-HL iqaphele isidingo sohlelo lokupholisa lwe-MBE liquid nitrogen, umgogodla wezobuchwepheshe ohleliwe ukuze kuthuthukiswe ngempumelelo uhlelo olukhethekile lwe-MBE liquid nitrogen cooing lobuchwepheshe be-MBE kanye nesethi ephelele yesistimu yamapayipi afakwe i-vacuum insulation, olusetshenziswe emabhizinisini amaningi, emanyuvesi nasezikhungweni zocwaningo.
Izinkinga ezivamile zemboni ye-semiconductor kanye ne-chip zifaka phakathi,
- Ukucindezela kwe-Liquid Nitrogen ku-Terminal (MBE). Vimbela ukucindezeleka ngokweqile emishinini eyonakalisayo ye-Terminal (MBE).
- Izilawuli Zokungena Nokuphuma Koketshezi Eziningi Ezine-Cryogenic
- Izinga Lokushisa Le-Nitrogen Ewuketshezi Emishinini Yesiphetho
- Inani Elifanele Lokukhishwa Kwegesi E-Cryogenic
- (Okuzenzakalelayo) Ukushintshana Kwemigqa Eyinhloko Neyegatsha
- Ukulungiswa Kokucindezela (Ukunciphisa) kanye Nokuzinza kwe-VIP
- Ukuhlanza Ukungcola Okungenzeka kanye Nensalela Yeqhwa Ethangini
- Isikhathi Sokugcwalisa Semishini Yoketshezi Yesiphetho
- Ukupholisa Amapayipi Ngaphambi Kokuphakelwa
- Ukumelana Noketshezi Kuhlelo lwe-VIP
- Lawula Ukulahlekelwa Yi-Nitrogen Ewuketshezi Ngesikhathi Sokungasebenzi Kwesistimu
Ipayipi Elifakwe I-Vacuum Insulated (VIP) le-HL lakhiwe ngokwekhodi yepayipi lokucindezela i-ASME B31.3 njengendinganiso. Ulwazi lobunjiniyela kanye nekhono lokulawula ikhwalithi ukuqinisekisa ukusebenza kahle kanye nokusebenza kahle kwesitshalo sekhasimende.
IZIXAZULULO
I-HL Cryogenic Equipment inikeza amakhasimende uhlelo lwe-Vacuum Insulated Piping System ukuze kuhlangatshezwane nezidingo nemibandela yemboni ye-semiconductor kanye ne-chip:
1. Uhlelo Lokuphatha Ikhwalithi: Ikhodi Yamapayipi Okucindezela e-ASME B31.3.
2.Isihlukanisi Sesigaba Esikhethekile Esine-Multiple Cryogenic Liquid Inlet kanye ne-Outlet enomsebenzi wokulawula okuzenzakalelayo ihlangabezana nesidingo sokukhishwa kwegesi, i-nitrogen ewuketshezi ephinde yasetshenziswa kanye nokushisa kwe-nitrogen ewuketshezi.
3. Umklamo wokukhipha umoya owanele futhi ofike ngesikhathi uqinisekisa ukuthi imishini yokugcina isebenza ngaphakathi kwenani lokucindezela eliklanywe kahle.
4. I-Gas-liquid Barrier ifakwa epayipini le-VI eliqondile ekugcineni kwepayipi le-VI. I-Gas-liquid Barrier isebenzisa isimiso sokuvala igesi ukuvimba ukushisa kusukela ekugcineni kwepayipi le-VI kuya epayipini le-VI, futhi inciphise ngempumelelo ukulahleka kwe-nitrogen ewuketshezi ngesikhathi senkonzo engaqhubeki nengahleliwe yesistimu.
5. Ipayipi le-VI Elilawulwa yiValve Efakwe Umshini Wokushaja (VIV) Uchungechunge: Kufaka phakathi iValve Efakwe Umshini Wokushaja (i-Pneumatic), iValve Yokuhlola Efakwe Umshini Wokushaja, iValve Yokulawula Efakwe Umshini Wokushaja njll. Izinhlobo ezahlukene ze-VIV zingahlanganiswa ngendlela efanayo ukulawula i-VIP njengoba kudingeka. I-VIV ihlanganiswe ne-VIP prefabrication kumkhiqizi, ngaphandle kokwelashwa okufakwe Umshini Wokushaja endaweni. Iyunithi yokuvala ye-VIV ingashintshwa kalula. (I-HL yamukela uhlobo lwe-valve olubizwa ngokuthi i-cryogenic valve oluqokwe amakhasimende, bese yenza amavalve afakwe umshini wokushaja yi-HL. Amanye amabhrendi namamodeli amavalvu kungenzeka angakwazi ukwenziwa amavalvu afakwe umshini wokushaja.)
6. Ukuhlanzeka, uma kunezidingo ezengeziwe zokuhlanzeka kobuso bepayipi langaphakathi. Kuphakanyiswa ukuthi amakhasimende akhethe amapayipi ensimbi engagqwali e-BA noma e-EP njengamapayipi angaphakathi e-VIP ukuze kuncishiswe ukuchitheka kwensimbi engagqwali.
7. Isihlungi Esifakwe Umshini Wokuhlanza: Hlanza ukungcola okungenzeka kanye nezinsalela zeqhwa ethangini.
8.Ngemva kwezinsuku ezimbalwa noma ukuvalwa noma ukulungiswa okude, kubalulekile kakhulu ukupholisa imishini ye-VI Piping kanye ne-terminal ngaphambi kokufakwa koketshezi olu-cryogenic, ukuze kugwenywe ukuchitheka kweqhwa ngemuva kokungena koketshezi olu-cryogenic ngqo kumishini ye-VI Piping kanye ne-terminal. Umsebenzi wangaphambi kokupholisa kufanele ucatshangelwe ekwakhiweni. Uhlinzeka ngokuvikelwa okungcono kwemishini ye-terminal kanye nemishini yokusekela i-VI Piping efana nama-valve.
9. Ilungele kokubili uhlelo lwamapayipi oluguquguqukayo (oluguquguqukayo) nolunamandla.
10. Uhlelo Lokuphayipha Olune-Dynamic Vacuum Insulated (Flexible): Luqukethe ama-VI Flexible Hoses kanye/noma i-VI Pipe, ama-Jumper Hoses, i-Vacuum Insulated Valve System, ama-Phase Separators kanye ne-Dynamic Vacuum Pump System (kufaka phakathi ama-vacuum pump, ama-solenoid valves kanye nama-vacuum gauges njll.). Ubude be-single VI Flexible Hose bungenziwa ngokwezifiso ngokwezidingo zomsebenzisi.
11. Izinhlobo Ezihlukahlukene Zokuxhuma: Uhlobo Lokuxhuma Nge-Vacuum Bayonet (VBC) kanye Nokuxhuma Okuhlanganisiwe kungakhethwa. Uhlobo lwe-VBC aludingi ukwelashwa okufakwe ngaphakathi.
