Izindaba - Iphrojekthi ye-Chip MBE Iqedwe Eminyakeni Edlule

Ubuchwepheshe

I-Molecular beam epitaxy, noma i-MBE, iyindlela entsha yokukhulisa amafilimu amancane amakristalu ekhwalithi ephezulu kuma-crystal substrates. Ezimweni ze-vacuum ephezulu kakhulu, isitofu sokushisa sifakwe zonke izinhlobo zezingxenye ezidingekayo futhi sikhiqize umusi, ngokusebenzisa izimbobo ezakhiwe ngemva kokushayisana kwe-athomu ye-athomu noma i-molecule yamangqamuzana, umjovo oqondile ekushiseni okufanelekile kwe-crystal substrate eyodwa, olawula ugongolo lwamangqamuzana ukuya. ukuskena kwe-substrate ngesikhathi esifanayo, kungenza ama-molecule noma ama-athomu ezingxenyeni ze-crystal alignment enze ifilimu elincanyana ku-substrate "yokukhula".

Ukusebenza okuvamile kwemishini ye-MBE, ukuhlanzeka okuphezulu, umfutho ophansi kanye ne-ultra-clean liquid nitrogen kuyadingeka ukuthi kuthuthwe ngokuqhubekayo nangokuzinzile kuyise egumbini lokupholisa lamathuluzi. Ngokuvamile, ithangi elihlinzeka nge-nitrogen ewuketshezi linengcindezi yokukhiphayo phakathi kuka-0.3MPa no-0.8MPa.I-nitrogen ewuketshezi engu- -196℃ ihwamuka kalula ibe yi-nitrogen ngesikhathi sokuthutha ngepayipi. Uma i-nitrogen ewuketshezi enesilinganiso soketshezi lwegesi engaba ngu-1:700 isifakwe igesi epayipini, izothatha indawo enkulu yokugeleza kwe-nitrogen ewuketshezi futhi inciphise ukugeleza okuvamile ekupheleni kwepayipi le-nitrogen eliwuketshezi. Ngaphezu kwalokho, ethangini lokugcina i-nitrogen ewuketshezi, kungenzeka kube nemfucumfucu engakahlanzwa. Epayipini le-nitrogen eliwuketshezi, ukuba khona komoya omanzi kuzoholela nasekukhiqizeni i-ice slag. Uma lokhu kungcola kukhishelwa emishinini, kuzodala umonakalo ongalindelekile emishinini.

Ngakho-ke, i-nitrogen ewuketshezi ethangini lokugcina langaphandle ithunyelwa kumishini ye-MBE endaweni yokusebenzela engenathuli ngokusebenza kahle okuphezulu, ukuzinza nokuhlanzeka, nokucindezela okuphansi, akukho nitrogen, akukho ukungcola, amahora angama-24 angaphazamiseki, uhlelo olunjalo lokulawula ezokuthutha umkhiqizo ofanelekayo.

Ukufanisa imishini ye-MBE

Kusukela ngo-2005, i-HL Cryogenic Equipment (HL CRYO) ibithuthukisa futhi ithuthukisa lolu hlelo futhi isebenzisane nabakhiqizi bemishini ye-MBE bamazwe ngamazwe. Abakhiqizi bemishini ye-MBE, okuhlanganisa i-DCA, REBER, banobudlelwano bokubambisana nenkampani yethu. Abakhiqizi bemishini ye-MBE, okuhlanganisa i-DCA ne-REBER, babambisane ngenani elikhulu lamaphrojekthi.

I-Riber SA ingumhlinzeki oholayo womhlaba wonke wemikhiqizo ye-molecular beam epitaxy (MBE) kanye nezinsizakalo ezihlobene zocwaningo oluhlanganisiwe lwe-semiconductor kanye nezicelo zezimboni. Idivayisi ye-Riber MBE ingafaka izingqimba ezincane kakhulu zezinto ku-substrate, ngezilawuli eziphakeme kakhulu. Imishini ye-vacuum ye-HL Cryogenic Equipment (HL CRYO) ifakwe i-Riber SA Impahla enkulu kunazo zonke i-Riber 6000 kanti encane kunazo zonke i-Compact 21. Isesimweni esihle futhi ibonwe amakhasimende.

I-DCA iyi-oxide MBE ehamba phambili emhlabeni. Kusukela ngo-1993, ukuthuthukiswa okuhlelekile kwamasu e-oxidation, ukushisa kwe-antioxidant substrate kanye nemithombo ye-antioxidant kuye kwenziwa. Ngenxa yalesi sizathu, ama-laboratories amaningi ahamba phambili akhethe ubuchwepheshe be-DCA oxide. I-Composite semiconductor MBE izinhlelo zisetshenziswa emhlabeni jikelele. I-VJ liquid nitrogen circulating system ye-HL Cryogenic Equipment (HL CRYO) kanye nemishini ye-MBE yamamodeli amaningi e-DCA anolwazi olufanayo kumaphrojekthi amaningi, njengemodeli P600, R450, SGC800 njll.