Ubuchwepheshe
I-epitaxy ye-molecular beam, noma i-MBE, iyindlela entsha yokutshala amafilimu amancane asezingeni eliphezulu amakristalu kuma-substrate ekristalu. Ezimweni ze-vacuum eziphakeme kakhulu, isitofu sokushisa sihlonyiswe ngazo zonke izinhlobo zezingxenye ezidingekayo futhi sikhiqize umusi, ngokusebenzisa izimbobo ezakhiwe ngemva kokuhlanganisa i-athomu noma i-molecule beam, ukujova ngqo ekushiseni okufanele kwe-single crystal substrate, ukulawula i-molecule beam kuya ekuskeni kwe-substrate ngesikhathi esifanayo, kungenza ama-molecule noma ama-athomu ezingqimbeni zokuvumelanisa ikristalu ukwakha ifilimu encane "ekukhuleni" kwe-substrate.
Ukuze kusebenze kahle imishini ye-MBE, kudingeka ukuhlanzeka okuphezulu, umfutho ophansi kanye ne-nitrogen ewuketshezi ehlanzekile kakhulu ukuthi ithuthwe njalo nangokuzinzile iye ekamelweni lokupholisa lemishini. Ngokuvamile, ithangi elihlinzeka nge-nitrogen ewuketshezi linomfutho wokukhipha ophakathi kuka-0.3MPa no-0.8MPa. I-nitrogen ewuketshezi ku--196℃ ishiswa kalula ibe yi-nitrogen ngesikhathi sokuthuthwa kwepayipi. Uma i-nitrogen ewuketshezi enesilinganiso segesi noketshezi esingaba ngu-1:700 igesiwe epayipini, izothatha indawo enkulu yokugeleza kwe-nitrogen ewuketshezi futhi inciphise ukugeleza okuvamile ekugcineni kwepayipi le-nitrogen ewuketshezi. Ngaphezu kwalokho, ethangini lokugcina i-nitrogen ewuketshezi, kungenzeka kube nokungcola okungakahlanzwa. Epayipini le-nitrogen ewuketshezi, ukuba khona komoya omanzi kuzoholela ekwakhiweni kwe-ice slag. Uma lokhu kungcola kukhishelwa emishinini, kuzodala umonakalo ongalindelekile emishinini.
Ngakho-ke, i-nitrogen ewuketshezi ethangini lokugcina impahla yangaphandle ithuthwa iye emishinini ye-MBE endaweni yokusebenzela engenalo uthuli ngokusebenza kahle kakhulu, ukuzinza nokuhlanzeka, kanye nokucindezela okuphansi, akukho nitrogen, akukho ukungcola, amahora angama-24 angaphazanyiswa, uhlelo olunjalo lokulawula ukuhamba luwumkhiqizo ofanelekile.
Imishini yokufanisa ye-MBE
Kusukela ngo-2005, i-HL Cryogenic Equipment (HL CRYO) ibilokhu ithuthukisa futhi ithuthukisa lolu hlelo futhi ibambisana nabakhiqizi bemishini ye-MBE bamazwe ngamazwe. Abakhiqizi bemishini ye-MBE, okuhlanganisa i-DCA, i-REBER, banobudlelwano bokubambisana nenkampani yethu. Abakhiqizi bemishini ye-MBE, okuhlanganisa i-DCA ne-REBER, babambisene emisebenzini eminingi.
I-Riber SA ingumhlinzeki ohamba phambili emhlabeni wonke wemikhiqizo ye-molecular beam epitaxy (MBE) kanye nezinsizakalo ezihlobene zocwaningo lwe-compound semiconductor kanye nezicelo zezimboni. Idivayisi ye-Riber MBE ingabeka izendlalelo ezincane kakhulu zezinto ezingaphansi komhlaba, ngokulawula okuphezulu kakhulu. Imishini ye-vacuum ye-HL Cryogenic Equipment (HL CRYO) ifakwe i-Riber SA. Imishini enkulu kunazo zonke yi-Riber 6000 kanti encane kunazo zonke yi-Compact 21. Isesimweni esihle futhi iqashelwe amakhasimende.
I-DCA iyi-MBE ehamba phambili emhlabeni ye-oxide. Kusukela ngo-1993, kuye kwenziwa ukuthuthukiswa okuhlelekile kwamasu okuxilisa, ukushisa kwe-antioxidant substrate kanye nemithombo ye-antioxidant. Ngenxa yalesi sizathu, amalabhorethri amaningi ahamba phambili akhethe ubuchwepheshe be-DCA oxide. Izinhlelo ze-MBE ze-semiconductor ezihlanganisiwe zisetshenziswa emhlabeni wonke. Uhlelo lwe-VJ liquid nitrogen circulating system lwe-HL Cryogenic Equipment (HL CRYO) kanye nemishini ye-MBE yamamodeli amaningi e-DCA zinolwazi olufanayo kumaphrojekthi amaningi, njengemodeli ye-P600, i-R450, i-SGC800 njll.
Ithebula Lokusebenza
| Isikhungo Sezobuchwepheshe Sefiziksi saseShanghai, i-Chinese Academy of Sciences |
| I-11th Institute of China Electronics Technology Corporation |
| Isikhungo Sabaqondisi Bezinto Ezincane, i-Chinese Academy of Sciences |
| I-Huawei |
| I-Alibaba DAMO Academy |
| I-Powertech Technology Inc. |
| I-Delta Electronics Inc. |
| I-Suzhou Everbright Photonics |
Isikhathi sokuthunyelwe: Meyi-26-2021
